Technology Description and Intellectual Property

Scanning Probe Lithography (SPL) is a novel technique for nano-fabrication with unique capabilities for highly scalable speed (parallel operation), enhanced resolution, and ultra-high registration of multiplexed molecular-scale biomaterials (Fig. 1). Methods like e-beam lithography can provide high resolution and highregistration; however, e-beam lithography is slow, requires specialized resist chemistry and generally is incompatible with patterning large numbers of soft radiation sensitive bio-molecules. Methods such as stamping and nanoimprinting are powerful tools with high throughputs, and can operate in ambient environments; however, no existing stamping technology possesses the registration capabilities needed to position different chemical and biochemical receptors at each individual site in an ultra-dense multiplexed nano-array. As perhaps the only lithographic technique that offers high resolution and multiplexed registration with parallel direct-write printing capabilities, SPL is a particularly attractive tool for patterning biological and soft organic structures onto surfaces. These molecules can be deposited in either ambientor inert environments without exposing them to ionizing UV or electron-beam radiation. Furthermore, several different kinds of molecules can be deposited without exposing the substrate to harsh solvents or chemical etchants, and without isking cross-contamination—the desired chemistry is carried out exactly, and only, where it is desired.