Pilot Project A14 is concerned with SOI (Silicon-on-Insulator) technology for harsh environment MNT sensors-circuits co-integration, with particular application to vehicle structural health monitoring, but also, as shown by our study, high potential extension to engine, energy and cabin control.Harsh environments are originally characterized by extreme operation under one or several of the following stress conditions : mechanical, thermal orchemical. More and more, an additional characteristic of such environments can becometheir remote or difficult-to-access location. Harsh environment microsystems thus become very complex systems which combine arrays of diverse sensors with high-performance electronics including sensor interface, analog and digital signal processing, memory and communication (possibly wireless) circuits.